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Volumn 93, Issue 1, 2003, Pages 175-181

A model for crystal growth during metal induced lateral crystallization of amorphous silicon

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; CRYSTALLIZATION; DIFFUSION; NICKEL; NUCLEATION; RATE CONSTANTS; SILICA; SURFACE REACTIONS; THERMAL EFFECTS; THIN FILMS;

EID: 0037250142     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1526937     Document Type: Article
Times cited : (26)

References (14)
  • 4
    • 0012882536 scopus 로고
    • edited by Y. Kuo, D. G. Ast, M. Hack, M. Matsumura, M. L. Contellec, and E. Lueder (The Electrochemical Society, Pennington)
    • S. W. Lee, Y. C. Jeon, and S. K. Joo, in Thin Film Transistor Technologies II, edited by Y. Kuo, D. G. Ast, M. Hack, M. Matsumura, M. L. Contellec, and E. Lueder (The Electrochemical Society, Pennington, 1994), p. 115.
    • (1994) Thin Film Transistor Technologies II , pp. 115
    • Lee, S.W.1    Jeon, Y.C.2    Joo, S.K.3
  • 6
    • 0012826159 scopus 로고    scopus 로고
    • edited by C. L. Claeys, H. Iwai, G. Bronner, and R. Fair (The Electrochemical Society, Pennington)
    • A. R. Joshi and K. C. Saraswat, in ULSI Process Integration, edited by C. L. Claeys, H. Iwai, G. Bronner, and R. Fair (The Electrochemical Society, Pennington, 1999), p. 361.
    • (1999) ULSI Process Integration , pp. 361
    • Joshi, A.R.1    Saraswat, K.C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.