Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems

Optics Letters

Volumn 26, Issue 10, 2001, Pages 716-718

  Mogensen, Klaus B ^a   Friis, Peter ^a   Hübner, Jörg ^a   Petersen, Nickolaj ^a   Jørgensen, Anders M ^a   Telleman, Pieter ^a   Kutter, Jörg P ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCHEMICAL MICROSYSTEMS;

ABSORPTION SPECTROSCOPY; BIOCHEMISTRY; OPTICAL DEVICES; SILICON COMPOUNDS;

OPTICAL WAVEGUIDES;

EID: 0001710599     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.26.000716     Document Type: Article

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