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Volumn 427, Issue , 1996, Pages 463-468
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PTFE nanoemulsions as spin-on, low dielectric constant materials for ULSI applications
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL RESISTANCE;
COATING TECHNIQUES;
HEAT RESISTANCE;
MICROEMULSIONS;
PERMITTIVITY;
PHASE EQUILIBRIA;
THERMODYNAMIC STABILITY;
THIN FILMS;
ULSI CIRCUITS;
LOW DIELECTRIC CONSTANT MATERIALS;
PARALLEL INTERCONNECT LINES;
PARASITIC CAPACITANCE;
SPIN COAT DEPOSITION;
POLYTETRAFLUOROETHYLENES;
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EID: 0030387940
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-427-463 Document Type: Conference Paper |
Times cited : (7)
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References (19)
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