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Volumn 427, Issue , 1996, Pages 463-468

PTFE nanoemulsions as spin-on, low dielectric constant materials for ULSI applications

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL RESISTANCE; COATING TECHNIQUES; HEAT RESISTANCE; MICROEMULSIONS; PERMITTIVITY; PHASE EQUILIBRIA; THERMODYNAMIC STABILITY; THIN FILMS; ULSI CIRCUITS;

EID: 0030387940     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-427-463     Document Type: Conference Paper
Times cited : (7)

References (19)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.