STM investigation of nano-structures fabricated on passivated Si surfaces

Korean Journal of Chemical Engineering

Volumn 20, Issue 1, 2003, Pages 169-173

  Ha, Jeong Sook ^a   Park, Kang Ho ^b   Park, Kyoung Wan ^b   Yun, Wan Soo ^c  

^a Korea University   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^c Korea Research Institute of Standards and Science   (South Korea)

Author keywords

Ag Nano dot; Atomic Force Microscope; Au Nano wire; Carbon Nanotube; Nano fabrication; Passivated Si Surfaces; Scanning Tunneling Microscope; Si Nano dot

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; ETCHING; MASKS; NANOSTRUCTURED MATERIALS; PASSIVATION; SCANNING TUNNELING MICROSCOPY; WIRE;

NANOWIRES;

SILICON;

EID: 0037243932     PISSN: 02561115     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02697204     Document Type: Article

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