A novel silicon micromachined gyroscope with high Q at atmosphere

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4601, Issue , 2001, Pages 38-42

  Xiong, Bin ^a   Wang, Yueling ^a   Che, Lufeng ^a   Wang, Weiyuan ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Angular rate sensor; Gyroscope; Resonant sensor; Silicon micromachining technology

Indexed keywords

GYROSCOPES; NATURAL FREQUENCIES; REACTIVE ION ETCHING; SENSORS; SILICON;

ANGULAR RATE SENSORS; SILICON MICROMACHINED GYROSCOPES;

MICROMACHINING;

EID: 0035768810     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.444719     Document Type: Conference Paper

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