Growth of rare earth silicides on silicon

Journal of Physics and Chemistry of Solids

Volumn 64, Issue 1, 2003, Pages 87-93

  Travlos, A ^a   Salamouras, N ^a   Boukos, N ^a  

^a INSTITUTE OF MATERIALS SCIENCE   (Greece)

Author keywords

A. Electronic materials; A. Thin films; C. Electron microscopy; D. Diffusion

Indexed keywords

ELECTRONIC MATERIALS;

ANNEALING; COMPRESSIVE STRESS; DIFFUSION; DYSPROSIUM; GROWTH (MATERIALS); POLYCRYSTALLINE MATERIALS; SILICON; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

RARE EARTH COMPOUNDS;

EID: 0037213392     PISSN: 00223697     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3697(02)00264-0     Document Type: Article

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