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Volumn 21, Issue 1 SPEC., 2003, Pages 168-173

Microstructure and crystallinity of porous silicon and epitaxial silicon layers fabricated on p+ porous silicon

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; EPITAXIAL GROWTH; EVAPORATION; POROSITY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

EID: 0037207706     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1537714     Document Type: Article
Times cited : (17)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.