ELTRAN by water-jet splitting in stress-controlled porous Si

IEEE International SOI Conference

Volumn , Issue , 1999, Pages 110-111

  Sakaguchi, K ^a   Yanagita, K ^a   Kurisu, H ^a   Suzuki, H ^a   Ohmi, K ^a   Yonehara, T ^a  

^a CANON INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MULTILAYERS; POROUS MATERIALS; SILICON WAFERS;

WATER JET SPLITTING METHOD;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0033313976     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)