Investigation of KrF excimer laser ablation and induced surface damage on lithium niobate

Applied Surface Science

Volumn 201, Issue 1-4, 2002, Pages 196-203

  Chong, Han Woo ^a   Mitchell, Arnan ^a   Hayes, Jason P ^b   Austin, Michael W ^a  

^a RMIT UNIVERSITY   (Australia)

^b SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

Excimer laser ablation; Lithium niobate; SiO 2 overlayer; Surface damage

Indexed keywords

EXCIMER LASERS; KRYPTON; LITHIUM NIOBATE; SCANNING ELECTRON MICROSCOPY; SILICA;

SURFACE DAMAGES;

LASER ABLATION;

EID: 0037202577     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00904-2     Document Type: Article

References (18)

1. Weis R.S., Gaylord T.K. Appl. Phys. A 37 1985 191.
2. Wooten E.L., Kissa K.M., Yan A.Y., Murphy E.J., Lafaw D.A., Hallemeier P.F., Maack D., Attanasio D.V., Fritz D.J., McBrien G.J., Bossi D.E. IEEE J. Selected Topics Quantum Elec. 6 2000 69.
3. Burns W.K., Howerton M.M., Moeller R.P., Krähenbühl R., McElhanon R.W., Greenblatt A.S. J. Lightwave Technol. 17 1999 2551.
4. Greenblatt A.S., Bulmer C.H., Moeller R.P., Burns W.K. J. Lightwave Technol. 13 1995 2314.
5. Cheng C.C., Porte H., Corenco A., Goedgebuer J.P., Armbruster V. IEEE Photon. Technol. Lett. 9 1997 1361.
6. Chen K., Ihlemann J., Simon P., Baumann L., Sohler W. Appl. Phys. A 65 1997 517.
7. Ichikawa T., Kagami M., Ito H. Opt. Lett. 23 1998 1138.
8. Mitsugi N., Nagata H. J. Vac. Sci. Technol. A 16 1998 2245.
9. Chong H.W., Mitchell A., Austin M.W. Wet etching techniques for the realisation of novel electrode structures on X and Z-cut lithium niobate IEEE Proc. COMMAD 2000 2000 194-197.
10. Noguchi K., Mitomi O., Miyazawa H. J. Lightwave Technol. 16 1998 615.
11. Mitomi O., Naguchi K., Miyazawa H. IEEE Trans. MTT 43 1995 2203.
12. Chong H.W., Mitchell A., Hayes J.P., Austin M.W. Proc. SPIE 4557 2001 119.
13. Gamaly E.G., Rode A.V., Luther-Davies B. J. Appl. Phys. 85 1999 4213.
14. Kelly R., Rothenberg J.E. Nucl. Instru. Method B 7/8 1985 755.
15. Christensen F.K., Müllenborn M. Appl. Phys. Lett. 66 1995 2772.
16. Bunton P., Binkley M., Asbury G. Appl. Phys. A 65 1997 411.
17. Dhar A., Mansingh A. J. Appl. Phys. 68 1990 5804.
18. Jones S.C., Braunlich P., Casper R.T., Shen X.A., Kelly P. Opt. Eng. 28 1989 1039.