Wet etching techniques for the realisation of novel electrode structures on X and Z-cut lithium niobate

Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD

Volumn 2000-January, Issue , 2000, Pages 194-197

  Chong, H W ^a   Mitchell, A ^a   Austin, M W ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; MICROELECTRONICS; NIOBIUM COMPOUNDS; PHOTONIC DEVICES;

ELECTRO-OPTIC MODULATORS; ELECTRODE DESIGN; ELECTRODE STRUCTURE; ETCH PROPERTIES; LITHIUM NIOBATE; PROTON EXCHANGE; SURFACE MACHINING; WET ETCHING TECHNIQUES;

WET ETCHING;

EID: 0011284991     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COMMAD.2000.1022924     Document Type: Conference Paper

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