Challenges in electron cyclotron resonance plasma etching of LiNbO3 surface for fabrication of ridge optical waveguides

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2245-2251

  Mitsugi, Naoki ^a   Nagata, Hirotoshi ^a   Shima, Kaori ^a   Tamai, Masumi ^a  

^a SUMITOMO OSAKA CEMENT CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032331540     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581334     Document Type: Article

References (9)

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