Low temperature oxidation of CVD SiC by electron cyclotron resonance plasma

Materials Chemistry and Physics

Volumn 75, Issue 1-3, 2002, Pages 235-240

  Goto, Takashi ^a   Masumoto, Hiroshi ^a   Niizuma, Mineo ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

CVD SiC; Electron cyclotron resonance plasma; Nano silicon; Oxidation

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; LOW TEMPERATURE OPERATIONS; NANOSTRUCTURED MATERIALS; OXIDATION; PLASMA APPLICATIONS; REACTION KINETICS;

ELECTRON CYCLOTRON RESONANCE PLASMA; NANO SILICON;

SILICON CARBIDE;

EID: 0037188168     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(02)00068-8     Document Type: Conference Paper

References (16)