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Volumn 44, Issue 2, 2002, Pages 359-370
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Effect of oxygen partial pressure on the high-temperature oxidation of CVD SiC
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Author keywords
Bubbles; Chemical vapor deposition; CO2 gas; Linear parabolic; Parabolic; Silicon carbide
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Indexed keywords
ACTIVATION ENERGY;
BUBBLE FORMATION;
CHEMICAL VAPOR DEPOSITION;
OXIDATION;
OXYGEN;
PARTIAL PRESSURE;
PRESSURE EFFECTS;
REACTION KINETICS;
OXIDATION KINETICS;
OXYGEN PARTIAL PRESSURE;
SILICON CARBIDE;
COATING;
CORROSION PREVENTION;
GAS TURBINE;
HIGH TEMPERATURE CORROSION;
SILICON CARBIDE;
VAPOR DEPOSITION;
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EID: 0036466971
PISSN: 0010938X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0010-938X(01)00066-X Document Type: Article |
Times cited : (42)
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References (21)
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