In situ core-level and valence-band photoelectron spectroscopy of reactively sputtered titanium aluminum nitride films

Physical Review B - Condensed Matter and Materials Physics

Volumn 63, Issue 11, 2001, Pages

  Schüler, Andreas ^a   Oelhafen, Peter ^a  

^a UNIVERSITY OF BASEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; TITANIUM;

ARTICLE; CHEMICAL ANALYSIS; CHEMICAL STRUCTURE; FILM; PHYSICAL CHEMISTRY; SPECTROSCOPY;

EID: 0034895763     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.63.115413     Document Type: Article

References (43)

1. W.-D. Münz, J. Vac. Sci. Technol. A, 4, 2717 (1986).
2. O. Knotek, W.-D. Münz, and T. Leyendecker, J. Vac. Sci. Technol. A, 5, 2173 (1987).
3. G. Håkansson, J. E. Sundgren, D. McIntire, J. E. Green, and W.-D. Münz, Thin Solid Films, 153, 55 (1987).
4. O. Knotek, W. Bosch, and T. Leyendecker (unpublished).
5. J. M. Molarius, A. S. Korhonen, E. Harju, and R. Lappalainen, Surf. Coat. Technol., 33, 117 (1983).
6. D. McIntire, J. E. Green, G. Håkansson, J. E. Sundgren, and W.-D. Münz, J. Appl. Phys., 67, 1542 (1990).
7. A. Michalski, J. Mater. Sci. Lett., 4, 251 (1985).
8. R. Beyers, R. Sinclair, and M. E. Thomas, J. Vac. Sci. Technol. B, 2, 781 (1984).
9. O. Knotek and T. Leyendecker, J. Solid State Chem., 70, 318 (1987).
10. S. Inamura, K. Nobugai, and F. Kanamaru, J. Solid State Chem., 68, 124 (1987).
11. I. Penttinen, J. M. Molarius, A. S. Korhonen, and R. Lappalainen, J. Vac. Sci. Technol. A, 6, 2158 (1988).
12. I. J. R. Baumvol, F. C. Stedile, W. H. Schreiner, F. L. Freire, Jr., and A. Schröer, Surf. Coat. Technol., 59, 187 (1993).
13. J. C. Schuster and J. Bauer, J. Solid State Chem., 53, 260 (1984).
14. M. Takahashi, F. Kanamaru, M. Harada, and I. Watanabe, J. Phys. IV France, 7, C2-1215 (1997).
15. M. Hansen and K. Anderko, Constitution of Binary Alloys, 2nd ed. (McGraw-Hill, New York, 1985).
16. T. B. Massalski, J. L. Murray, L. H. Bennett, and H. Baker, Binary Alloy Phase Diagrams (American Society for Metals, Metals Park, OH, 1986).
17. A. Schüler, R. Gampp, and P. Oelhafen, Phys. Rev. B, 60, 16 164 (1999).
18. P. Gantenbein, R. Gampp, S. Albietz, T. Richmond, and P. Oelhafen, Metal Containing Hydrogenated Amorphous Carbon (a-C:H): in situ Photoelectron Spectroscopy and ex situ Atomic Force Microscopy Studies, Proceedings of the 9th International Colloquium on Plasma Processes, CIP 93 (Société Frańcaise du Vide, Paris, 1993), pp. 113–115.
19. P. Oelhafen, P. Gantenbein, and R. Gampp, Proc. SPIE, 2255, 64 (1994).
20. D. Ugolini, J. Eitle, and P. Oelhafen, Vacuum, 41, 1374 (1990).
21. D. Ugolini, P. Oelhafen, and M. Wittmer, in Amorphous Hydrogenated Carbon Films, edited by P. Koidl and P. Oelhafen (Les Editions de Physique, Les Ulis, 1987).
22. P. Oelhafen, D. Ugolini, S. Schelz, and J. Eitle, in Diamond and Diamond-Like Films and Coatings, edited by R. E. Clausing, L. L. Horton, J. C. Angus, and P. Koidl (Plenum, New York, 1991), p. 377.
23. D. A. Shirley, Phys. Rev. B, 5, 4709 (1972).
24. S. Hüfner, Photoelectron Spectroscopy: Principles and Applications, 2nd ed. (Springer-Verlag, Berlin, 1996), p. 144.
25. J. H. Scofield, J. Electron Spectrosc. Relat. Phenom., 8, 129 (1976).
26. M. P. Seah and W. A. Dench, Surf. Interface Anal., 1, 2 (1979).
27. L. Porte, L. Roux, and J. Hanus, Phys. Rev. B, 28, 3214 (1983).
28. P. H. Citrin, G. K. Wertheim, and Y. Baer, Phys. Rev. Lett., 35, 885 (1975).
29. H. Höchst, R. D. Bringans, P. Steiner, and Th. Wolf, Phys. Rev. B, 25, 7183 (1982).
30. D. A. Shirley, in Photoemission in Solids, edited by M. Cardona and L. Ley (Springer, Berlin, 1979), Chap. 4, p. 165.
31. L. Ramqvist, K. Hamrin, G. Johansson, A. Fahlmann, and C. Nordling, J. Phys. Chem. Solids, 30, 1835 (1969).
32. J. Friedel, Comments Solid State Phys., 2, 21 (1969).
33. J. C. Fuggle and Z. Zolnierek, Solid State Commun., 38, 799 (1981).
34. S. Doniach and M. Sunjic, J. Phys. C, 3, 285 (1970).
35. I. Nakamura, M. Kamiya, I. Takano, and Y. Sawada, Jpn. J. Appl. Phys., Part 1, 36, 2308 (1997).
36. A. Neckel, P. Rastl, R. Eibler, P. Weinberger, and K. Schwarz, J. Phys. C, 9, 579 (1976).
37. R. Ahuja, D. Eriksson, J. M. Wills, and B. Johansson, Phys. Rev. B, 53, 3072 (1996).
38. B. Song, H. Nakamatsu, R. Sekine, T. Mukoyama, and K. Taniguchi, J. Phys.: Condens. Matter, 10, 9443 (1998).
39. E. Ruiz, S. Alvarez, and P. Alemany, Phys. Rev. B, 49, 7115 (1994).
40. C. I. Wu and A. Kahn, Appl. Phys. Lett., 74, 546 (1999).
41. G. K. Wertheim, Z. Phys. D: At. Mol. Clusters, 12, 3120 (1989).
42. G. K. Wertheim, Phys. Rev. Lett., 51, 2310 (1983).
43. H. Hövel, B. Grimm, M. Pollmann, and B. Reihl, Phys. Rev. Lett., 81, 4608 (1998).