Indium-tin-oxide thin film prepared by microwave-enhanced d.c. reactive magnetron sputtering for telecommunication wavelengths

Thin Solid Films

Volumn 422, Issue 1-2, 2002, Pages 80-86

  Meng, Li Jian ^a   Crossan, Eddie ^b   Voronov, Andrei ^b   Placido, Frank ^b  

^a INSTITUTO SUPERIOR DE ENGENHARIA DO PORTO   (Portugal)

^b UNIVERSITY OF THE WEST OF SCOTLAND   (United Kingdom)

Author keywords

Indium tin oxide; Magnetron sputtering; Optical properties; Thin film; Transparent conducting oxide

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; ELLIPSOMETRY; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PARTIAL PRESSURE; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING INDIUM COMPOUNDS; SPECTROSCOPIC ANALYSIS;

TELECOMMUNICATION WAVELENGTHS;

THIN FILMS;

EID: 0037147197     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00894-5     Document Type: Article

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