Carbon bonding states and mechanical properties of hydrogenated DLC films deposited in electrostatic and electromagnetic RF plasma modes

International Journal of Modern Physics B

Volumn 16, Issue 6-7, 2002, Pages 836-840

  Sun, Z ^a   Xu, S ^b   Ostrikov, K N ^a,b,c,d   Tsakadze, E L ^b   Tsakadze, Z L ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c FLINDERS UNIVERSITY   (Australia)

^d NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARBON; POLYMER;

CHEMICAL BINDING; CONFERENCE PAPER; ELECTRICITY; ELECTROMAGNETIC RADIATION; FILM; FREQUENCY MODULATION; GAS MIXER; HARDNESS; HYDROGENATION; MAGNETISM; MOLECULAR MECHANICS; PLASMA; RADIOFREQUENCY; REACTOR; STRESS; STRUCTURE ANALYSIS; VAPOR;

EID: 0037139098     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0217979202010476     Document Type: Conference Paper

References (6)