Radio frequency plasma chemical vapor deposited thin films of diamond-like carbon/SiO2 nanocomposites by way of tetraethoxysilane

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 5, 1999, Pages 2129-2135

  Senkevich, Jay J ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22844454903     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (2)

1. X-D. Pan, E. A. Maydell, R. H. Milne, and D. J. Fabian, Vacuum 41, 1360 (1990).
2. N. Mutskura and K. Miyatani, Diamond Relat. Mater. 4, 342 (1995).