RF-sputtered PZT thin films for infrared sensor arrays

Ferroelectrics

Volumn 225, Issue 1-4, 1999, Pages 57-66

  Kohler R ^a,b   Suchaneck, G ^a   Padmini, P ^a   Sandner, T ^a   Gerlach, G ^a   Hofmann, G ^b  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b DIAS Angewandte Sensorik GmbH   (Germany)

Author keywords

Ferroelectric; Infrared sensor array; Pyroelectric; Pyroelectric sensor

Indexed keywords

EID: 0002987946     PISSN: 00150193     EISSN: None     Source Type: Journal    
DOI: 10.1080/00150199908009111     Document Type: Article

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