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Volumn 14, Issue 2, 2002, Pages 154-157
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Patterning mesoscale gradient structures with self-assembled monolayers and scanning tunneling microscopy based replacement lithography
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Author keywords
[No Author keywords available]
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Indexed keywords
GRAFTING (CHEMICAL);
LITHOGRAPHY;
SCANNING TUNNELING MICROSCOPY;
SEMICONDUCTING SILICON;
VAPOR DEPOSITION;
MESOSCALE GRADIENT STRUCTURES;
SELF ASSEMBLY;
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EID: 0037116533
PISSN: 09359648
EISSN: None
Source Type: Journal
DOI: 10.1002/1521-4095(20020116)14:2<154::AID-ADMA154>3.0.CO;2-B Document Type: Article |
Times cited : (106)
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References (27)
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