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Volumn 14, Issue 2, 2002, Pages 154-157

Patterning mesoscale gradient structures with self-assembled monolayers and scanning tunneling microscopy based replacement lithography

Author keywords

[No Author keywords available]

Indexed keywords

GRAFTING (CHEMICAL); LITHOGRAPHY; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING SILICON; VAPOR DEPOSITION;

EID: 0037116533     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-4095(20020116)14:2<154::AID-ADMA154>3.0.CO;2-B     Document Type: Article
Times cited : (106)

References (27)
  • 24
    • 0007900809 scopus 로고    scopus 로고
    • Replacement conditions: 3.1 V, 8 pA, 40 nm/s, relative humidity: 58 %
  • 25
    • 0007895832 scopus 로고    scopus 로고
    • note


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.