Nitrogen induced structure control of vertically aligned carbon nanotubes synthesized by microwave plasma enhanced chemical vapor deposition

Thin Solid Films

Volumn 418, Issue 2, 2002, Pages 85-88

  Lee, Jeong Young ^a   Lee, Byung Soo ^a  

^a Chonbuk National University   (South Korea)

Author keywords

Carbon nanotubes; Chemical vapor deposition; Transmission electron microscope

Indexed keywords

CATALYSTS; CONCENTRATION (PROCESS); ETCHING; MICROWAVES; NITROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

FEED GAS;

CARBON NANOTUBES;

EID: 0037109176     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00788-5     Document Type: Article

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