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Volumn 65, Issue 24, 2002, Pages 2453231-2453236
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Scaling laws in etched Si surfaces
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Author keywords
[No Author keywords available]
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Indexed keywords
SILICON;
ANISOTROPY;
ARTICLE;
ATOMIC FORCE MICROSCOPY;
CRYSTALLIZATION;
ELASTICITY;
GROWTH;
GROWTH RATE;
KINETICS;
MATHEMATICAL ANALYSIS;
MATHEMATICAL MODEL;
MOLECULAR DYNAMICS;
SIMULATION;
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EID: 0037098480
PISSN: 01631829
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (28)
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References (37)
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