Kinetic roughening in etched Si

Physica A: Statistical Mechanics and its Applications

Volumn 295, Issue 1-2, 2001, Pages 149-153

  Dotto, M E R ^a   Kleinke, M U ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

AFM; Etched surfaces and morphology; Percolation; Scaling

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; KINETIC THEORY; MORPHOLOGY; PERCOLATION (SOLID STATE); SURFACE ROUGHNESS;

KINETIC ROUGHENING;

SILICON WAFERS;

EID: 0035368830     PISSN: 03784371     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0378-4371(01)00068-1     Document Type: Conference Paper

References (7)