Optical emission spectroscopy of pulsed hexalfuoropropylene oxide and tetrafluoroethylene plasmas

Journal of Applied Physics

Volumn 91, Issue 12, 2002, Pages 9547-9555

  Cruden, Brett A ^a   Gleason, Karen K ^a   Sawin, Herbert H ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION MEASUREMENTS; CO EMISSIONS; CONTINUUM EMISSION; ELECTRON DISTRIBUTIONS; ETCHING REACTION; HEXAFLUOROPROPYLENE OXIDE; OPTICAL EMISSION SPECTRA; ROTATIONAL STRUCTURES; ROTATIONAL TEMPERATURE; STEADY STATE; TEMPERATURE TRANSIENTS; TETRAFLUOROETHYLENE;

ARGON; EMISSION SPECTROSCOPY; FLUORINE; FLUORINE CONTAINING POLYMERS; LIGHT EMISSION; TRANSIENTS;

PLASMAS;

EID: 0037098027     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1471386     Document Type: Article

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