In situ observation of infrared spectra of some molecular fragments and products in rf discharge plasmas generated in an absorption cell of a Fourier transform infrared spectrometer

Review of Scientific Instruments

Volumn 68, Issue 6, 1997, Pages 2305-2311

  Iinuma, K ^a   Sasaki, N ^b   Takahashi, T ^a   Fujisawa, M ^a   Suzuki, J ^a   Satoh, K ^a   Furukawa, K ^a   Satoh, Y ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b YAMAGATA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006320655     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148140     Document Type: Article

References (14)

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