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Surface and Coatings Technology

Volumn 153, Issue 2-3, 2002, Pages 155-159

Substrate heating by sputter-deposition of AlN: The effects of dc and rf discharges in nitrogen atmosphere

(2) Drüsedau, Tilo P a Koppenhagen, Kay a

a OTTO VON GUERICKE UNIVERSITY (Germany)

Author keywords

Aluminum nitride; Calorimetric probe; Reactive magnetron sputtering; TRIDYN simulations

Indexed keywords

CALORIMETRY; COMPUTER SIMULATION; DIMERS; MONTE CARLO METHODS; SPUTTER DEPOSITION; STOICHIOMETRY; SUBSTRATES;

POWER DENSITY;

ALUMINUM NITRIDE;

ALUMINUM NITRIDE; COATING; CORROSION RESISTANCE; SPUTTERING; STRESS;

EID: 0037091091 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(01)01691-7 Document Type: Article

Times cited : (23)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.