Critical island size of the SiC formation on Si(1 0 0) and Si(1 1 1)

Materials Science and Engineering: B

Volumn 89, Issue 1-3, 2002, Pages 201-204

  Scharmann, F ^a   Attenberger, W ^b   Lindner, J K N ^b   Pezoldt, J ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

Atomic force microscope; Critical island size; Heteroepitaxy; Nucleation; Silicon carbide on silicon; Transmission electron microscope

Indexed keywords

ATOMIC FORCE MICROSCOPY; NUCLEATION; SEMICONDUCTING SILICON; TRANSMISSION ELECTRON MICROSCOPY;

HETEROEPITAXY;

SILICON CARBIDE;

EID: 0037074855     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(01)00852-2     Document Type: Conference Paper

References (12)