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Diamond and Related Materials

Volumn 6, Issue 10, 1997, Pages 1311-1315

Chemical conversion of Si to SiC by solid source MBE and RTCVD

(7) Pezoldt, J a Cimalla, V a Stauden, Th a Ecke, G a Eichhorn, G a Scharmann, F a Schipanski, D a

a ILMENAU UNIVERSITY OF TECHNOLOGY (Germany)

Author keywords

Molecular beam epitaxy; Polytypism; Reflection high energy electron diffraction; Silicon carbide

Indexed keywords

EID: 0001430601 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(97)00087-3 Document Type: Article

Times cited : (19)

References (17)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.