Applications of microwave reflectance methods to the study of p-Si in fluoride solutions

Journal of Electroanalytical Chemistry

Volumn 538-539, Issue , 2002, Pages 191-203

  Cass, M J ^a   Duffy, N W ^b   Kirah, K ^c   Peter, L M ^b   Pennock, S R ^d   Ushiroda, S ^b   Walker, A B ^a  

^a University of Bath   (United Kingdom)

^b University of Bath   (United Kingdom)

^c Ain Shams University   (Egypt)

^d University of Bath   (United Kingdom)

Author keywords

Electropolishing; Light modulated microwave reflectivity; Microwave; Porous silicon; Potential modulated microwave reflectivity; Silicon

Indexed keywords

CAPACITANCE; CARRIER CONCENTRATION; CHARGE TRANSFER; ELECTRIC SPACE CHARGE; ELECTROLYTIC POLISHING; ELECTROMAGNETIC WAVE REFLECTION; FLUORINE COMPOUNDS; LIGHT MODULATION; MICROWAVES; POROUS SILICON; RATE CONSTANTS; REDUCTION; SEMICONDUCTOR JUNCTIONS; SILICON; SOLUTIONS; SURFACE REACTIONS;

MICROWAVE REFLECTANCE;

ELECTROCHEMISTRY;

EID: 0037073459     PISSN: 00220728     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0728(02)01141-5     Document Type: Article

References (41)

1. Bogomolni R.A., Tributsch H., Petermann G., Klein M.P. J. Chem. Phys. 78:1983;2578.
2. Kunst M., Tributsch H. Chem. Phys. Lett. 105:1984;123.
3. Kunst M., Beck G., Tributsch H. J. Electrochem. Soc. 131:1984;954.
4. Schlichthörl G., Tributsch H. Electrochim. Acta. 37:1992;919.
5. Tributsch H., Schlichthörl G., Lester L. Electrochim. Acta. 38:1993;141.
6. Wunsch F., Nakato Y., Kunst M., Tributsch H. J. Chem. Soc. Faraday Trans. 92:1996;4053.
7. Tributsch H. White R.E. Modern Aspects of Electrochemistry. 33:1999;435 Kluwer Academic/Plenum, New York.
8. Schlichthörl G., Peter L.M. J. Electrochem. Soc. 141:1994;L171.
9. Schlichthörl G., Ponomarev E.A., Peter L.M. J. Electrochem. Soc. 142:1995;3062.
10. Schlichthörl G., Peter L.M. J. Electrochem. Soc. 142:1995;2665.
11. Schlichthörl G., Peter L.M. J. Electroanal. Chem. 381:1995;55.
12. Cattarin S., Chazalviel J.N., DaFonseca C., Ozanam F., Peter L.M., Schlichthörl G., Stumper J. J. Electrochem. Soc. 145:1998;498.
13. Bohm S., Peter L.M., Schlichthörl G., Greef R. J. Electroanal. Chem. 500:2001;178.
14. Natarajan A., Nellore A., Searson P.C. J. Appl. Phys. 85:1999;1631.
15. Natarajan A., Oskam G., Searson P.C. J. Appl. Phys. 83:1998;2112.
16. Kenyon C.N., Ryba G.N., Lewis N.S. J. Phys. Chem. 97:1993;12928.
17. Forbes M.D.E., Lewis N.S. J. Am. Chem. Soc. 112:1990;3682.
18. Peter L.M., Vanmaekelbergh D. Alkire R.C., Kolb D.M. Advances in Electrochemical Science and Engineering. 6:1999;77 VCH Wiley, Weinheim.
19. Ponomarev E.A., Peter L.M. J. Electroanal. Chem. 396:1995;219.
20. Peter L.M., Ponomarev E.A., Fermin D.J. J. Electroanal. Chem. 427:1997;79.
21. Peter L.M., Li J., Peat R. J. Electroanal. Chem. 165:1984;29.
22. Li J., Peat R., Peter L.M. J. Electroanal. Chem. 165:1984;41.
23. Peter L.M. Chem. Rev. 90:1990;753.
24. Peat R., Peter L.M. J. Electroanal. Chem. 209:1986;307.
25. Peat R., Peter L.M. Electrochim. Acta. 31:1986;731.
26. Li J., Peter L.M. J. Electroanal. Chem. 182:1985;399.
27. Peter L.M., Borazio A.M., Lewerenz H.J., Stumper J. J. Electroanal. Chem. 290:1990;229.
28. Lewerenz H.J., Stumper J., Peter L.M. Phys. Rev. Lett. 61:1988;1989.
29. G. Schlichthörl, Ph.D. thesis, Fachbereich Chemie, Freie Universität, Berlin, 1991.
30. Schlichthörl G., Lewerenz H.J. J. Electroanal. Chem. 443:1998;9.
31. Sze S.M. Physics of Semiconductor Devices. 1981;Wiley, New York.
32. Press W.H., Flannery B.P., Teukolsky S.A., Vetterling W.T. Numerical Recipes in C. 1988;University Press, Cambridge.
33. Gärtner W.W. Phys. Rev. 116:1959;84.
34. Bailes M., Bohm S., Peter L.M., Riley D.J., Greef R. Electrochim. Acta. 43:1998;1757.
35. Sze S.M. Semiconductor Device Physics and Technology. 1985;Wiley, New York.
36. De Mierry P., Ballutaud D., Aucouturier M., Etcheberry A. J. Electrochem. Soc. 137:1990;2966.
37. De Mierry P., Etcheberry A., Aucouturier M. Physica B. 170:1991;124.
38. De Mierry P., Etcheberry A., Aucouturier M. J. Appl. Phys. 69:1991;1099.
39. Herring C., Johnson N.M., Van de Walle C.G. Phys. Rev. B. 6412:2001;5209.
40. Pearton S.J., Corbett J.W., Borenstein J.T. Physica B. 170:1991;85.
41. Tuttle B., Van de Walle C.G., Adams J.B. Phys. Rev. B. 59:1999;5493.