Characterization of silicon surfaces in HF solution using microwave reflectivity

Journal of Applied Physics

Volumn 83, Issue 4, 1998, Pages 2112-2120

  Natarajan, Arun ^a   Oskam, Gerko ^a   Searson, Peter C ^a  

^a Whiting School of Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000503568     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366945     Document Type: Article

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