Photonic integration using inductively coupled argon plasma enhanced quantum well intermixing

Electronics Letters

Volumn 38, Issue 25, 2002, Pages 1672-1673

  Djie, H S ^a   Sookdhis, C ^a   Mei, T ^a   Arokiaraj, J ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY GAP; INDUCTIVELY COUPLED PLASMA; INTEGRATED CIRCUIT LAYOUT; SEMICONDUCTOR LASERS; SILICA;

EXTENDED CAVITY LASER; PASSIVE WAVEGUIDE LOSS; PHOTONICS; QUANTUM WELL INTERMIXING;

SEMICONDUCTOR QUANTUM WELLS;

EID: 0037028314     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20021112     Document Type: Article

References (8)

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2. OOI, B.S., BRYCE, A.C., and MARSH, J.H.: 'Integration process for photonic integrated circuits using plasma damage induced layer intermixing'. Electron Lett., 1995, 31, (6), pp. 449-451
3. + ion implantation induced disorder in strained InGaAsP multiple quantum wells'. Electron. Lett., 1998, 34. pp. 817-818
4. WEE, T.C.L., OOI, B.S., ONG, T.K., LAM, Y.L., CHAN, Y.C., and NG, G.I.: 'Novel quantum well intermixing in InGaAs-InGaAsP laser structure using argon plasma exposure'. Conf. Dig. IEEE Lasers and Electro-Optics Europe, USA, 2000, p 234
5. DJIE, H.S., MEI, T., AROKIARAJ, J., and THILAKAN, P.: 'High-density plasma enhanced quantum well intermixing in InGaAs/InGaAsP structure using argon plasma', Jpn. J. Appl. Phys. Lett., 2002, 41, pp. L867-L869
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8. QIU, B.C., BRYCE, A.C., DE LA RUE, R.M., and MARSH, J.H.: 'Monolithic intergration in InGaAs-InGaAsP mutiquantum-well structure using laser processing', IEEE Photonics Technol. Lett., 1998, 10, (6), pp. 769-771