Effect of substrate bias voltage on the properties of arc ion-plated TiN films onto high speed steels

Journal of Materials Research

Volumn 11, Issue 5, 1996, Pages 1149-1156

  Yamamoto, Syuji ^a   Ichimura, Hiroshi ^a  

^a SUMITOMO METAL MINING CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CRYSTAL GROWTH; CRYSTAL ORIENTATION; MECHANICAL PROPERTIES; PHYSICAL PROPERTIES; PLATING; RESIDUAL STRESSES; STRUCTURE (COMPOSITION); TITANIUM NITRIDE; WEAR RESISTANCE; X RAY DIFFRACTION;

ARC ION PLATED TITANIUM FILMS; HIGH DENSITY STRUCTURE; ION PLATING PROCESS; SCRATCH TESTER; SUBSTRATE BIAS VOLTAGE;

PROTECTIVE COATINGS;

EID: 0030150453     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1996.0148     Document Type: Article

References (19)

1. A. C. Raghuram and R. F. Bunshar, J. Vac. Sci. Technol. 9, 1389 (1972).
2. D. Wang and T. Oki, Thin Solid Films 185, 219 (1990).
3. Y. Okamoto and E. Kamijyo, Nissin Denki Gihou (Jpn.) 32, 56 (1987).
4. D. S. Rickerby, G. Eckold, K. T. Scott, and I. M. Buckley-Golder, Thin Solid Films 154, 125 (1987).
5. S. Yamamoto and H. Ichimura, J. Mater. Res. 7, 2240 (1992).
6. H. Ichimura, Bull. Ceram. Soc. Jpn. 24, 433 (1989).
7. O. Knoteck, R. Elsing. G. Kramer, and F. Jungblut, Surf. Coating Technol. 46, 265 (1991).
8. A. Kawana and H. Ichimura, unpublished research.
9. R. C. Sun, T. C. Tisone, and P. D. Cruzan, J. Appl. Phys. 46, 112 (1975).
10. Mechanical Properties of Ceramics (Ceramic Society of Japan, 1979), p. 507.
11. P. A. Steimann and H. E. Hintermann, J. Vac. Sci. Technol. A 3, 2349 (1985).
12. J. Pelleg, L. Z. Zevin, S. Lungo, and N. Groitoru, Thin Solid Films 197, 117-128 (1991).
13. Y. Chiba and H. Ichimura, J. Ceram. Soc. Jpn. 103, 162 (1995).
14. I. Petrov, L. Hultman, U. Helmersson, J. E. Sundgren, and J. E. Green, Thin Solid Films 169, 299-314 (1989).
15. A. J. Perry, Thin Solid Films 107, 2397 (1985).
16. J. Valli, V. Makela, A. Matthews, and V. Murawa, J. Vac. Sci. Technol. A 3, 2411 (1985).
17. W. D. Münz, J. Vac. Sci. Technol. A 4, 2717 (1986).
18. H. Ichimura and A. Kawana, J. Mater. Res. 8, 1093 (1993).
19. H. Freller and H. Haessler, Thin Solid Films 153, 67 (1987).