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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 5, 1996, Pages 2814-2819

Transient characteristics of nitrogen gas-pulsed electron cyclotron resonance plasma

(5) Park, Young Ju a Ozasa, Kazunari b O'Keeffe, Patrick b,c Aoyagi, Yoshinobu b Min, Suk Ki a

a Korea Institute of Science and Technology (South Korea)

b INST OF PHYS AND CHEMICAL RESEARCH (Japan)

c Irie Koken Co Ltd (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007948025 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.580204 Document Type: Article

Times cited : (2)

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