Infrared characterisation of evaporated SiO thin films

Thin Solid Films

Volumn 416, Issue 1-2, 2002, Pages 24-30

  Perez G ^a   Sanz, J M ^b  

^a CIDA   (Spain)

^b UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

Infrared spectroscopy; Optical properties; Silicon oxide; Structural properties

Indexed keywords

ANTIREFLECTION COATINGS; CHEMICAL BONDS; DEPOSITION; EVAPORATION; INFRARED SPECTROSCOPY; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SILICON COMPOUNDS;

RANDOM BONDING MODEL (RBM);

THIN FILMS;

EID: 0037009766     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00720-4     Document Type: Article

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