Texture evolution of Cu thin films during annealing

Materials Science Forum

Volumn 408-412, Issue II, 2002, Pages 1639-1644

  Perez Prado M T ^a   Vlassak, J J ^b  

^a DEPARTMENT OF PHYSICAL METALLURGY   (Spain)

^b HARVARD UNIVERSITY   (United States)

Author keywords

Multiple Twinning; Texture; Thin Films

Indexed keywords

ANNEALING; COPPER; CRYSTAL MICROSTRUCTURE; ELECTROPLATING; GRAIN GROWTH; TEXTURES;

PRE-ANNEALING TEXTURE;

THIN FILMS;

EID: 0036999562     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.408-412.1639     Document Type: Conference Paper

References (20)

1. D. Weiss. PhD Dissertation. Max Planck Institute für Metallforschung, Stuttgart, 2000.
2. R.P.Vinci, E.M. Zielinski, and J.C. Bravman: Thin Solid Films. 262 (1995), p. 142.
3. W.D. Nix: Metall. Trans. A. 20 (1989), p.2217.
4. S.P.Baker, A. Kretschman, and E.Artz:. Acta mater. 49 (2001), p. 2145.
5. R.P. Vinci, J. J. Vlassak: Ann. Rev. Mat. Sc. 26 (1996), p.431.
6. C.V. Thompson and R. Carel: J. Mech. Phys. Solids. 44(5) (1996), p. 657.
7. J. Greiser, D.Müller, P. Müllner, C.V. Thompson, and E. Artz:. Scripta Materialia. 41(7) (1999), p. 709.
8. E.M. Zielinski, R.P. Vinci, and J.C. Bravman: Appl. Phys. Lett. 67(8) (1995), p.1078.
9. H.J. Frost, C.V. Thompson, and D.T.Walton: Acta metal. Mater. 38(8) (1990), p. 1455.
10. H.J. Frost, C.V. Thompson, and D.T.Walton: Acta metal. Mater. 40(4) (1992), p. 779.
11. L.G.Shultz: J. Appl. Phys. 20 (1949), p. 1030.
12. S.H. Hong, K.H. Chung, and C.H. Lee: Mater. Sci. Eng. 206 (1996), p. 225.
13. V. Randle. Microtexture Determination and its Applications. The institute of Metals, 1992.
14. J.K. Mackenzie: Biometrica. 45 (1958), p. 229.
15. N.A. Pangarov: J. Electr. Chem. 9 (1965), p.70.
16. J.M.E. Harper, C.Jr. Cabral, P.C. Andricacos, L. Gignac, I.C. Noyan, K.P. Rodbell, and C.K. Hu: J. Appl. Phys. 86(5) (1999), p. 2516.
17. F. Haessner. Recrystallization of Metallic Materials. Dr. Riederer-Verlag Gmbh, 1978.
18. F.J. Humphreys FJ and M. Hatherly. Recrystallization and Related Annealing Phenomena. Pergamon Press, 1995.
19. A. Berger,P.J. Wilbrandt, F. Ernst, U. Klement, and P. Haasen: Prog. Mater. Sci; 32 (1988), p.1.
20. W.W. Mullins: Acta Metall. 6 (1958), p. 414.