A three dimensional measurement system with micro tactile sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4902, Issue , 2002, Pages 52-59

  Cao, S ^a   Hassler Grohne W ^a   Brand, U ^a   Gao, S ^a   Wilke, R ^b   Buttgenbach S ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

3d tactile sensor; Coordinate measuring machine; Laser interferometry; Metrology frame; Microsystem technology

Indexed keywords

INTERFEROMETERS; INTERFEROMETRY; OPTICAL DEVICES; PIEZOELECTRIC TRANSDUCERS; PRECISION ENGINEERING; SENSORS; THREE DIMENSIONAL;

LASER INTERFEROMETRY; MICRO TACTILE SENSOR; THREE DIMENSIONAL MEASUREMENT SYSTEM;

COORDINATE MEASURING MACHINES;

EID: 0036980861     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.468214     Document Type: Conference Paper

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