3D Probe for Dimensional Metrology on Microsystem Components;Miniaturisierter 3D-Tastsensor für die Metrologie an Mikrostrukturen

Technisches Messen

Volumn 66, Issue 12, 1999, Pages 490-495

  Kleine Besten, Thomas ^a   Loheide, Stefan ^a   Brand, Uwe ^a   Schlachetzki, Andreas ^b   Bütefisch, Sebastian ^b   Büttgenbach, Stephanus ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

3-D CROSSTALKS; 3-D MEASUREMENT; CONTACT PROCESS; DIMENSIONAL METROLOGY; MEASUREMENT TECHNIQUES; MICROSYSTEM COMPONENTS; SILICON MICROMACHINING TECHNOLOGY; TACTILE SENSORS;

MICROSYSTEMS; SENSORS; UNCERTAINTY ANALYSIS; UNITS OF MEASUREMENT;

THREE DIMENSIONAL;

EID: 0001540930     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

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4. Bütefisch, S., Büttgenbach, S.: Taktiler Dreikomponenten-Kraftsensor, Technisches Messen 5/99 (1999), 185.
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