Grating pitch measurements with the molecular measuring machine

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3806, Issue , 1999, Pages 46-53

  Kramar, J A ^a   Jun, J S ^a   Penzes, W B ^a   Scire, F E ^a   Teague, E C ^a   Villarrubia, J S ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DIFFRACTION GRATINGS; FOCUSING; HOLOGRAPHIC INTERFEROMETRY; LASER APPLICATIONS; PHOTORESISTS; SCANNING TUNNELING MICROSCOPY;

GRATING PITCH MEASUREMENTS; LASER-FOCUSED ATOMIC DEPOSITIONS; MICHELSON INTERFEROMETRY;

OPTICAL DISK STORAGE;

EID: 0033361567     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)