Micro-electromechanical variable capacitors for RF applications

Midwest Symposium on Circuits and Systems

Volumn 1, Issue , 2002, Pages

  Tsang, Tommy K K ^a   El Gamal, Mourad N ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; POLYSILICON; VARACTORS; VARIABLE FREQUENCY OSCILLATORS; WIRELESS TELECOMMUNICATION SYSTEMS;

FREQUENCY TUNING;

MICROELECTROMECHANICAL DEVICES;

EID: 0036973719     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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10. D. Koester et al., "MUMPs Design Handbook Rev. 7.0," Cronos Integrated Microsystems, 2001.