Development of a novel micro electromechanical tunable capacitor with a high tuning range

Annual Device Research Conference Digest

Volumn , Issue , 2000, Pages 111-112

  Zou, Jun ^a   Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTRODES; FINITE ELEMENT METHOD; INTEGRATED CIRCUITS; SEMICONDUCTOR DEVICE MANUFACTURE;

ACTUATION ELECTRODE; CAPACITANCE ELECTRODE; CAPACITANCE VOLTAGE CHARACTERISTICS; MICROELECTROMECHANICAL TUNABLE CAPACITOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0033658485     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)