Observation of multiple defect states at silicon-silicon nitride interfaces fabricated by low-frequency plasma-enhanced chemical vapor deposition

Applied Physics Letters

Volumn 71, Issue 2, 1997, Pages 252-254

  Schmidt, Jan ^a   Schuurmans, Frank M ^b   Sinke, Wim C ^b   Glunz, Stefan W ^c   Aberle, Armin G ^a  

^a INSTITUTE FOR SOLAR ENERGY RESEARCH HAMELIN ISFH   (Germany)

^b TNO   (Netherlands)

^c FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000962572     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119512     Document Type: Article

References (20)

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