Thermal stability studies on 1, 3, 5, 7-tetramethylcyclotetrasiloxane (TMCTS), a low κ CVD precursor

Materials Research Society Symposium - Proceedings

Volumn 716, Issue , 2002, Pages 593-598

  Xu, C ^a   Borovik, A S ^a   Wang, Z ^a   Arno, J ^a   Baum, T H ^a  

^a ENTEGRIS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; GAS CHROMATOGRAPHY; HEATING; MASS SPECTROMETRY; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PERMITTIVITY; PYROLYSIS; REACTION KINETICS; STAINLESS STEEL; THERMODYNAMIC STABILITY; WATER;

DEGRADATION RATES; PRECURSOR; TETRAMETHYLCYCLOTETRASILOXANE;

ORGANIC COMPOUNDS;

EID: 0036950422     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-716-b12.8     Document Type: Conference Paper

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