The race is on: CVD and spin-on vie for the low-k dielectric market

Solid State Technology

Volumn 44, Issue 10, 2001, Pages

  Corbett, M A ^a   Davis, J C ^a  

^a Kline and Company   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MARKETING; PRODUCT DEVELOPMENT; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; TECHNOLOGY TRANSFER;

INTERCONNECT DIELECTRICS; SEMICONDUCTOR INDUSTRY; SPIN ON ORGANICS;

DIELECTRIC MATERIALS;

EID: 0035475675     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (3)