Ion-track structure and its effects in small size volumes of silicon

IEEE Transactions on Nuclear Science

Volumn 49 I, Issue 6, 2002, Pages 3022-3031

  Akkerman, A ^a   Barak, J ^a  

^a SOREQ NUCLEAR RESEARCH CENTER   (Israel)

Author keywords

Dielectric response theory; Dose radial distribution; Energy deposition in nanometer volumes; Inelastic atomic ion scattering; Straggling

Indexed keywords

COMPUTATIONAL METHODS; DIELECTRIC DEVICES; ELECTROMAGNETIC WAVE SCATTERING; ELECTRONS; ENERGY DISSIPATION; MONTE CARLO METHODS;

SUBMICRON DEVICES;

SEMICONDUCTING SILICON;

EID: 0036947519     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNS.2002.805366     Document Type: Conference Paper

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