Experimental determination of band offset energies between Zr silicate alloy dielectrics and crystalline Si substrates by XAS, XPS and AES and ab initio theory: A new approach to the compositional dependence of direct tunneling currents

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2002, Pages 617-620

  Lucovsky, Gerald ^a   Rayner, Bruce ^a   Zhang, Yu ^a   Whitten, Jerry ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BAND STRUCTURE; BINDING ENERGY; CHEMICAL BONDS; COMPOSITION; CRYSTALLINE MATERIALS; DIELECTRIC DEVICES; ELECTRONIC STRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICATES; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

BAND OFFSET ENERGIES;

ZIRCONIUM ALLOYS;

EID: 0036923459     PISSN: 01631918     EISSN: None     Source Type: Journal    
DOI: 10.1109/IEDM.2002.1175915     Document Type: Article

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