High-efficiency diffractive micromachined chopper for infrared wavelength and its application to a pyroelectric infrared sensor

Applied Optics

Volumn 37, Issue 7, 1998, Pages 1165-1170

  Ueda, Michihito ^a,b   Shiono, Teruhiro ^a,c   Ito, Tatsuo ^a,c   Yokoyama, Kazuo ^a,b,d  

^a PANASONIC CORPORATION   (Japan)

^b Ciba Central Research   (United Kingdom)

^c NONE   (Japan)

^d NONE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; DIFFRACTION GRATINGS; ELECTROSTATICS; FABRICATION; INFRARED RADIATION; LASER BEAMS; LIGHT MODULATION; MICROMACHINING; OPTICAL DESIGN; OPTICAL SENSORS; OPTIMIZATION; SILICON WAFERS;

DIFFRACTIVE MICROMACHINED CHOPPER; ELECTROSTATIC FORCE; INFRARED WAVELENGTH; INSERTION LOSS; PYROELECTRIC INFRARED SENSOR;

ELECTROOPTICAL DEVICES;

EID: 0032025559     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.001165     Document Type: Article

References (8)

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