Micromachined optical waveguide cantilever as a resonant optical scanner

Sensors and Actuators, A: Physical

Volumn 102, Issue 1-2, 2002, Pages 165-175

  Wang, Wei Chih ^a   Fauver, Mark ^b   Ho, Joe Nhut ^a   Seibel, Eric J ^a,b   Reinhall, Per G ^a  

^a University of Washington   (United States)

^b UNIVERSITY OF WASHINGTON   (United States)

Author keywords

Cantilever; Optical scanner; Waveguide

Indexed keywords

CANTILEVER BEAMS; LIGHT TRANSMISSION; MICROMACHINING; PASSIVATION; PHOTORESISTS; REACTIVE ION ETCHING; SCANNING; SILICA; SILICON WAFERS;

RESONANT OPTICAL SCANNERS;

OPTICAL WAVEGUIDES;

EID: 0036896808     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00303-5     Document Type: Article

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