Silicon micromechanical optical waveguide for sensing and modulation

Sensors and Actuators, A: Physical

Volumn 57, Issue 1, 1996, Pages 21-27

  Churenkov, Alexander V ^a  

^a MOSCOW INSTITUTE OF PHYSICS AND TECHNOLOGY   (Russian Federation)

Author keywords

Fibre optic sensors; Modulators; Silicon micromechanics; Silicon waveguides

Indexed keywords

ELECTRON DEVICE MANUFACTURE; FIBER OPTIC SENSORS; LIGHT MODULATION; LIGHT MODULATORS; MAGNETOSTRICTION; MICROMACHINING; OPTICAL FILMS; PHOTOLITHOGRAPHY; SWITCHING;

MAGNETOSTRICTION ACTUATION; PHOTOTHERMAL ACTUATION; SILICON MICROMECHANICAL WAVEGUIDES; SILICON MICROMECHANICS;

OPTICAL WAVEGUIDES;

EID: 0030261844     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80090-8     Document Type: Article

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