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Volumn 11, Issue 3-6, 2002, Pages 1068-1073
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Soft X-ray photoelectron microscopy used for the characterization of diamond, a-C and CNx, thin films
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Author keywords
a C; CNx; Coating; Diamond; Electron microscopy; Electron spectroscopy; Microstructure
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Indexed keywords
AMORPHOUS FILMS;
CARBON NITRIDE;
CHARACTERIZATION;
CHEMICAL VAPOR DEPOSITION;
CRYSTAL DEFECTS;
DIAMOND LIKE CARBON FILMS;
ELECTRON MICROSCOPY;
THIN FILMS;
X RAY ANALYSIS;
ELECTRON MICROGRAPHS;
DIAMOND FILMS;
STRUCTURAL ANALYSIS;
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EID: 0036508492
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(01)00597-0 Document Type: Article |
Times cited : (15)
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References (17)
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