메뉴 건너뛰기




Volumn 11, Issue 3-6, 2002, Pages 1068-1073

Soft X-ray photoelectron microscopy used for the characterization of diamond, a-C and CNx, thin films

Author keywords

a C; CNx; Coating; Diamond; Electron microscopy; Electron spectroscopy; Microstructure

Indexed keywords

AMORPHOUS FILMS; CARBON NITRIDE; CHARACTERIZATION; CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; DIAMOND LIKE CARBON FILMS; ELECTRON MICROSCOPY; THIN FILMS; X RAY ANALYSIS;

EID: 0036508492     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00597-0     Document Type: Article
Times cited : (15)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.