Graded TiN coating by supersonic free-jet PVD combined with reactive plasma

Materials Transactions

Volumn 43, Issue 11, 2002, Pages 2932-2994

  Yumoto, Atsushi ^a   Yamamoto, Takahisa ^b   Hiroki, Fujio ^a   Shiota, Ichiro ^a   Niwa, Naotake ^a  

^a KOGAKUIN UNIVERSITY   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Functionally graded material; Nanoparticle; Physical vapor deposition; Supersonic gas flow; Titanium nitride

Indexed keywords

CRACKS; PHYSICAL VAPOR DEPOSITION; PLASMA APPLICATIONS; SUBSTRATES; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

REACTIVE PLASMA;

CERAMIC COATINGS;

EID: 0036873302     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.43.2932     Document Type: Article

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