Texture enhancement of Al films on Ti underlayers by radio-frequency bias sputtering

Journal of Electronic Materials

Volumn 31, Issue 10 SPEC., 2002, Pages 1009-1015

  Park, Duk Seo ^a   Kim, Young Ho ^a  

^a Hanyang University   (South Korea)

Author keywords

Al thin films; Texture; Ti underlayerRF bias sputtering

Indexed keywords

ALUMINUM; ION BOMBARDMENT; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; TEXTURES; X RAY DIFFRACTION;

RADIO-FREQUENCY BIAS SPUTTERING;

THIN FILMS;

EID: 0036810331     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-002-0036-4     Document Type: Conference Paper

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